Measuring Range(测量范围):

X-axis :600mm

Y-axis :500mm

Z-axis :150mm

Measuring Uncertainty(测量精度):

U2 (X,Y) = 1.9 L/300 μm

U1  (Z) = 2.5 L/400 μm

Resolution(分辨率):

0.1 μm

System Construction(系统构造):

Precision lapped fine granite base(精密花岗岩平板)

High precision cross table(高精密度的十字桌)

Moving stage(运动轴承)

Drive System(驱动系统):

Backlash free ball screws through mass center(探头中心螺丝抗抖动（重液压）)

Servo motor drive for CNC of 3 -axis(DC伺服马达CNC的3轴伺服马达)

Precision Linear Motion guide system(精密线性运动指导系统)

Positioning Speed(传送速度):

0∼300mm/sec

Max. acceleration(加速度):

500mm/s?